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Industrial Drive South |
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Scanning Electron Microscopy/Energy Dispersive Spectroscopy
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Failure
Analysis and the SEM
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The SEM is one of the major tools in the failure analysis process. After initial visual examination of the specimen, the sequence of procedures for a SEM examination in a typical project might go as follows:
![]() EDS Spectrum |
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Newer is Better! Conventional
SEMs use high vacuum to achieve the the clean environment needed to examine
objects at high magnifications. The new SEMs can operate in a second mode-variable pressure. This allows specimens to be examined in their natural state. This is a terrific improvement because it eliminates the need for drying or coating. |
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